摘要
针对框体类零件超精密加工的难点问题——内表面间垂直度误差的高精度测量,提出了一种基于波面干涉技术测量的新方法,建立了垂直度测量系统,分析了各调整误差对测量结果的影响。该方法能够实现框体类零件内表面间垂直度误差的高精度测量与评价,并能得到误差的三维分布,测量结果可直接用于零件的确定性修形加工。实验表明,该方法可实现0.6″的综合测量精度。
High precision perpendicularity measurement of internal surfaces of frame parts is one of the most difficult problems in manufacturing. A novel method based on wave-front interferometer to measure the internal surfaces of frame parts is introduced in this paper, and the influencing factors in the measurement are also discussed theoretically. The experiment results show that the method can achieve high perpendicularity measurement accuracy of 0.6#. Considering the distribution of the perpendicularity errors derived, the measurement results can be used in error correction machining of the parts.
出处
《国防科技大学学报》
EI
CAS
CSCD
北大核心
2009年第4期36-41,共6页
Journal of National University of Defense Technology
基金
国家自然科学基金资助项目(60708016)
关键词
垂直度测量
内表面
最小二乘
波面干涉仪
perpendicularity measurement
internal surface
least square
wave-front interferometer
