摘要
选用高Ｔｃ超导薄膜ＹＢａ３Ｃｕ３Ｏ７－８，引用微加工技术，制出了４×４元面阵红外探测器，超导膜用湿法工艺光刻成折线结构，总线长约２０００μｍ，可提高敏感元工作电阻率。对于４×４元列阵，１６个敏感元公用电极的安排是关键。在设计中，１６个敏感元是同时读取信号，其探测率Ｄ在１．２×１０８～７．２×１０８ｃｍＨｚ１／２Ｗ－１之间，工作温度为８８Ｋ。
The 4×4 element arrays based on high T c superconducting film YBCO have been fabricated using the micromachining technology. The photolithography by the conventional wet etching procedure, the superconducting film represents a meander line structure with total line length is about 2000 μm, which results in the significant increase of the resistance for a sensor at T c. The arrangement of the common electrodes is critical for the 4×4 element arrays. The signals for 16 sensors are output simultaneously in our design. The detectivities D * for various sensitive elements are ranged from 1.2×10 8 to 7.2×10 8cmHz 1/2 W -1 at the operating temperature of 88K.
出处
《红外与激光工程》
EI
CSCD
1998年第4期42-46,共5页
Infrared and Laser Engineering
关键词
红外探测器
高Tc超导器件
焦平面列阵
Infrared detector\ \ High T c superconducting device\ \ Focal plane array
