摘要
采用减压降温原理研制了以液氮为冷媒的低温样品台系统，并配以电子束脉冲调制系统和微弱信号检测系统，构成了低温扫描电子显微镜。温度范围从６５Ｋ至室温连续可控变化，温度稳定度为±０．１Ｋ。并介绍了用此装置研究ＧｄＢａ２Ｃｕ３Ｏ７－Ｘ超导薄膜的初步情况。
A low temperature scanning electron microscope has been set up.This equipment composes of a cryogenic sample system and together with a high frequency electron beam modulation system and a phase-sensitive signal detection system.It can be operated in thetemperature range from 65K to 300K. A stability of typicdrlly±0.1K has been obtained.To observe GdBa2 Cu3 O7-Xfilm By the low-temperature scanning electron microscope is described,too.
出处
《低温工程》
CAS
CSCD
1994年第5期32-37,共6页
Cryogenics
关键词
低温
扫描电子显微镜
高Tc超导簿膜
low temperature,Scanning electron microscope,Hlgh-Tc superco-nducting film.
