摘要
载玻片在金属醇化物的溶胶中浸涂、热处理，获得厚度为５０～９０ｎｍ的ＴｉＯ２和ＸＡｌ２Ｏ３－ＹＴｉＯ２－ＺＳｉＯ２涂膜（Ｘ＝０～３０，Ｙ＝０．２５～０．６０，Ｚ＝０．２０～０．６５，摩尔分数）。使用原子力显微镜（ＡＦＭ）研究涂膜表面纳米范围的形貌。研讨了化学组成，热处理温度与时间，以及热处理前或后的贮存史对表面形貌，ｒｍｓ－均方根粗糙度和锐钛矿结晶的影响。
TiO 2 and X Al 2O 3 Y TiO 2 Z SiO 2 coatings( X =0￣0.30, Y =0.25￣0.60, Z = 0.20 ￣0.65 molar fraction) with thickness of 50￣90nm were prepared on microscope glasses by dip coating using an alkoxide base sol gel method. Their surface nanoscale topography was studied using atomic force microscopy(AFM). The effects of chemical compositions, heat treatments and the storage process in air before and after the heat treatment on the surface topography, the rms roughness and the crystallization of anatase were studied and discussed.
出处
《华东理工大学学报（自然科学版）》
CAS
CSCD
北大核心
1998年第4期453-457,466,共6页
Journal of East China University of Science and Technology
关键词
表面形貌
玻璃
涂膜
溶胶-凝胶法
原子力显微镜
surface nanoscale topography
TiO 2 coatings
Al 2O 3 TiO 2 SiO 2 coatings
atomic force microscopy
crystallization of anatase
sol gel method
