摘要
ＣＡＤ／ＣＡＥ技术在ＭＥＭＳ（ＭｉｃｒｏＥｌｅｃｔｒｏＭｅｃｈａｎｉｃａｌＳｙｓｔｅｍｓ）研究过程中具有非常重要的作用．本文首先介绍了用于ＭＥＭＳ的ＣＡＤ／ＣＡＥ技术特点，然后研究了ＭＥＭＳＣＡＤ／ＣＡＥ系统结构，给出了软件支持工具结构框图，指明了解决其中关键技术的途径．ＣＡＤ／ＣＡＥ技术的应用，将提高微型机电系统的设计质量，缩短研制周期，使之及早走向工业化．
CAD/CAE technique plays an important role in MEMS(Micro Electro Mechanical Systems) research, while MEMS CAD/CAE shares some common techniques with conventional CAD/CAE systems, it is also different in many ways.The characteristics of CAD/CAE techniques supporting MEMS were introduced firstly, then the system architecture of MEMS CAD/CAE was studied, the structure frame of software supporting tool was presented and the ways for solving the key techniques were expounded. The application of CAD/CAE technique will improve the design quality and shorten the research time of micro electro mechanical systems. As a result, it will lead to industrialization of MEMS sooner.
出处
《北京航空航天大学学报》
EI
CAS
CSCD
北大核心
1998年第4期475-478,共4页
Journal of Beijing University of Aeronautics and Astronautics
基金
国防科工委"九五"预研基金
关键词
软件工具
微型机电系统
CAD
CAE
CAD
system architecture
softwave tools
MEMS(Micro Electro Mechanical Systems)
CAE
