摘要
本文介绍了以磁阻效应为工作原理的ＩｎＳｂ精密角位移传感器的设计和制作。这种传感器的主要特点是高分辨率、非接触、体积小、重量轻和使用寿命长。性能测试结果表明，在±１２°范围内，其分辨率达０．
In this paper, the design and fabrication for InSb precise angular displacement sensor which works on the principle of magnetoresistance are des-cribed. The leading features of this sensor include fine resolution,contactless,small, lightweight and long service life. The results of the performance test show that the resolution factor of the sensor has reached 0.01° in the range of ±12°.
出处
《仪表技术与传感器》
CSCD
北大核心
1998年第2期1-3,共3页
Instrument Technique and Sensor
关键词
INSB
磁阻效应
角位移传感器
悬臂梁
传感器
InSb,Magneto resistance,Angular Displacement Sensor,Cantilever Counterweight Construction.
