摘要
提出了一种全角度并且可以连续测量微小角位移(秒级)的新型光纤角位移传感器.利用微小光学谐振腔的基本理论,主要是基于光学法布里珀罗(FabryPerot)腔的基本原理研究特定光波下光强度的变化与角位移的线性变化关系,利用光纤技术、敏感技术融合微机械技术研发而成.适合于一些特定领域中对角位移的精确测量.
A novel optical fiber angular displacement which can be used to measure micro angular displacement (second level) and all angle continuously is introduced. Basing on the principle of micro resonance cavity, especially on optical Fabry-Perot cavity, the linear relation between beam intensity and angular displacement with special beam has been researched. By using of optical fiber technology, sensing technology and micro mechanical technology,the sensor used in some special circumstance is produced for measuring angular displacement accurately.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2005年第7期1049-1052,共4页
Acta Photonica Sinica