摘要
利用加速度计的机械变形导致电阻的变化,设计了一种测量高g值的加速度计。在Coventor Ware软件下建立了加速度计的加工工艺流程和实体模型。利用压阻分析模块MemPZR,采用FEM分析方法,通过改变压阻块在悬臂梁上的位置,得到压阻块位置与器件输出电流之间的关系,找到了压阻块在悬臂梁上的最优放置位置。改变压阻块的电导率,验证了器件的灵敏度变化与压阻率变化的趋势是一致的。在20kg加速度的输入下,得到了压阻块应力的分布,以及电流的大小及分布,和悬臂梁的应力大小及分布,验证了加速度计的抗过载能力。
The change in resistivity caused by the mechanical deformation in a micro-accelerometer was used to design an accelerator to measure physical quantities such as high g acceleration. The process and a solid model were constructed in CoventorWare. With changing the position of a piezoresistive sensing element on the fix-end cantilever,the optimizing location of the sensing element as well as the relationship between the output current and the location are obtained by using Finite Element Mothod （FEM） in the MemPZR module. Changing the sensitivity by the same percentage, it is proved that electric conductivity changes are coincident with the sensitivity changes of the element. When 20 kg acceleration is inputted, the potential distribution of piezoresistor device terminals, the corresponding stresses of the piezoresistive element and the current location are also obtained,which testifies the anti-over loading ability from the stress location in the fix-end cantilever.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2009年第6期1442-1447,共6页
Optics and Precision Engineering
基金
Supported by the Natural Science Foundation of Liaoning Province(Grant No .ID20082047)
