摘要
提出了一种宏/微双驱动微进给机构的设计与控制方法。介绍了宏/微双驱动微位移机构的结构设计,将宏动(大行程)和微动(高分辨率)两者串联以获得理想的运动性能。该机构用步进电机作为宏动的驱动装置以获得大行程和高响应速度,用压电陶瓷微位移器作为精密运动以提高运动分辨率和运动精度。设计了该机构的控制系统,用一个基于模型的开关控制器对微位移装置进行控制,并设计专门的运动分配模块对宏/微运动进行协调控制。最后,分别控制宏动和微动装置对该系统进行了实验,并用激光干涉仪检测。检测结果表明,宏动装置的行程为90mm,运动分辨率为0.3μm;压电陶瓷微动装置的行程为40μm,定位精度为0.9μm。理论分析和实验结果均表明了控制策略的有效性。
The design and control of a Dual stage Feed Drive （DSFD） system on a ultra-precision ma chine is presented. The DSFD system combining coarse （large stroke） and fine （fine resolution） drive stages in series is designed to provide the desired performance,in which a step motor is used for the coarse motion to obtain the large stroke and fast response speed, and a piezoelectric micro-actuator for the fine motion to achieve the high resolution and accuracy. A control system for the mechanism is developed based on a multiple model based switching controller,and a movement distribution module is designed for the motion coordinations of coarse and fine movements, Finally,a experiment is undertaken by controlling both stages separately for the actual position on the DSFD system and a measure ment is carried out by a laser interferometer. The experimental results show that the step motor has a working stroke of 90 mm with the displacement resolution of 0.3 μm and the piezoelectric micro-actua tor has a working stroke of 40 μm with the positioning accuracy of 0.9μm, The theoretical and experimental results show the validity of the control algorithm.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2009年第6期1426-1430,共5页
Optics and Precision Engineering
基金
Supported by the National Natural Science Foundation of China(Grant No .50535020
5075055)
关键词
双驱动微位移器
开关控制器
控制策略
dual-stage drive micro displacement system
switching controller
control algorithm
