摘要
由于汽车应用环境相当恶劣，对机油压力传感器的可靠性要求很高。采用波纹膜片隔离技术设计了一种新型的MEMS机油压力传感器。分析了波纹膜片、充油腔体结构及硅油对压力传感器性能的影响。理论和实验结果指出，合理的设计波纹结构、充油腔体结构、减小腔体体积及净化好硅油是获得高性能机油压力传感器的关键.研制的传感器在温度为-40—125℃，量程为0．6MPa的工作条件下，测量精度优于1．5％。
There are high reliability requirements for the MEMS oil pressure sensors because of worse automotive application environment. A new type MEMS oil pressure sensor based on ripple membrane isolating technique is designed. The effect of the ripple membrane and the cavity structure of filling oil on sensor performance is analyzed. The theory analyzing and experimental results demonstrate to design suitably the ripple membrane and the cavity structure, reduce cavity volume and purify silica oil are a key to improve oil pressure sensor performances. The measuring precise of developed sensors is superior to 1.5 % at -40--125℃ and 0.6 MPa.
出处
《传感器与微系统》
CSCD
北大核心
2009年第6期86-88,共3页
Transducer and Microsystem Technologies
基金
河南省科技攻关计划资助项目(0624220036)
