摘要
半导体生产规划是典型的多目标优化问题,现有的优化方法存在一定的不足。本文在合理的假设和简化的基础上,提出最大化利润、设备利用率,最小化未满足量的模型,并采用基于案例推理的思想,结合自适应谐振理论和多目标进化算法,来解决半导体生产规划问题。仿真结果显示,该方法能有效地解决半导体生产规划问题。
The problem of capacity planning in semiconductor manufacturing system is a typical multi-objective problem,and the ex- isting optimization method is somewhat deficient. Based on some simplifying assumptions, a multi-objective optimization model which considers maximizing profit, utilization of capacity and minimizing unmet demand is proposed. This paper use case-based reasoning, combined with adaptive resonance theory and multi-objective genetic algorithm, to solve the problem. An illustration shows how these techniques work effectively in solving it.
出处
《微计算机信息》
2009年第18期1-3,共3页
Control & Automation
关键词
半导体制造
基于案例推理
自适应谐振理论
多目标遗传算法
semiconductor manufacturing
case-based reasoning
adaptive resonance theory
multi-objective generic algorithm
