摘要
通过观察场发射扫描电子显微镜下纳米Cu颗粒离子溅射镀膜前后纳米尺度的形貌,发现镀膜改变了纳米Cu颗粒的形貌,分析了离子溅射膜的形成过程,探讨了镀膜改变纳米颗粒形貌的原因,指出了观察纳米颗粒形貌时应该注意的问题.
The micro-morphology of the nano-copper particles with/without coating by ion sputtering was observed and investigated by using Field Emission Scanning Electron Microscope （FESEM）. The results obtained demonstrate that the micro-morphology of the nano-copper particles was changed. The film coating formation process was analyzed and the reason why the micro-morphology of nano-particles changed was discussed. Finally, points for attention were put forward for observing the morphology of nano-particles.
出处
《五邑大学学报（自然科学版）》
CAS
2009年第2期23-25,共3页
Journal of Wuyi University(Natural Science Edition)
关键词
纳米材料
离子溅射
镀膜
形貌改变
nanometer materials
ion sputtering
coating
deformation
