摘要
样品的预处理作为扫描电子显微镜观测前的必要工序,对观测结果的精确性和准确度有重要影响。本文论述了扫描电子显微镜样品预处理工艺的顺序,介绍了样品的安装方法,重点介绍了样品导电处理的方法,并对真空蒸发和溅射法工艺进行了简单归纳。
The pretreatment of the sample was a necessary process before scanning electron microscope observation, which had an important influence on the accuracy of the results. cussed, the installation method of the sample was introduced, the The sequence of sample pretreatment process was disconductive treatment method for samples was elaborated with detail, and the vacuum evaporation and sputtering process were induced in briefly
出处
《广州化工》
CAS
2013年第1期46-47,67,共3页
GuangZhou Chemical Industry
关键词
扫描电子显微镜
导电处理
离子束溅射
真空蒸发
scanning electron microscope
conductive treatment
vacuum evaporation
ion beam sputtering
