摘要
对半导体激光自混频干涉法测量表面粗糙度中的干涉效应进行了理论分析,推导了干涉信号与表面粗糙度的数学关系式,讨论了影响测量信号的因素及表征表面粗糙度的评定参数,即表面轮廓的方均根偏差。结果表明,随着加工表面粗糙度的降低,反射光的强度逐渐增加,被测物体表面的反射率越高,越有利于测量。
The theoretical analysis about the self-mixing interference effect was made,and a mathematics expression of the theories model for an interference signal was deduced.The some factors of influencing measures the signal and root-mean-square deviation were discussed in conclusion of this paper.These results show that the excursion of the measures signal lies on the change of following factors: reflect light of strength gradual increment.The higher reflectivity is on the surface of the object,the more remunerative it is to measure.
出处
《光学技术》
CAS
CSCD
北大核心
2007年第S1期42-43,共2页
Optical Technique
关键词
干涉效应
半导体激光
自混频干涉
粗糙度
interference effect
diode-laser
self-mixing interference
surface roughness
