摘要
研究了用磁控溅射制备的ＶＯ２热致变色薄膜；用Ｘ射线衍射，Ｘ射线光电子谱和原子力显微镜对薄膜的结构进行了分析；对薄膜的光学和电学特性也进行了研究。
VO 2 thermochromic films were prepared by reactive magnetron sputtering method.The macro and micro structures of the samples were characterized by XRD,XPS and AFM methods.The effects of sputtering parameters on the optical/electrical properties of VO 2 films were studied.The transitional properties of VO 2 films were characterized by the electrical resistance change in the phase transition process.
出处
《中国空间科学技术》
EI
CSCD
北大核心
1998年第2期48-51,67,共5页
Chinese Space Science and Technology
