摘要
简述了非晶硅薄膜太阳能电池基本原理,论述了采用等离子增强化学气相沉积(PECVD)技术生产非晶硅薄膜太阳能电池的工艺、产品性能参数及研究发展方向。
The fundamental principle of amorphous silicon thin film solar cell was briefly introduced and the process of amorphous silicon thin film solar cell by plasma enhancement chemical vapour deposition was described. The performance parameters and research and davelopment direction of this product were also pointed out.
出处
《玻璃》
2008年第12期49-51,共3页
Glass
