摘要
结合用于磨床加工的光外差表面粗糙度在线干涉测量仪，文中介绍了高精度动态相位计的设计与实现。依据相位测量和整数周期计数相结合的原理，不仅提高了测量精度，而且将测量范围得以扩大；利用锁相环频率跟踪的特点，实现动态测量。在工作中心频率为2MHz应用场合下，该相位计的测量精度达2．6°（相当于3．2nm），允许测量中最大多普勒频移±20kHz（对应高度的变化率±8．75×10-3m／s），完全满足磨床加工中表面粗糙度在线测量的要求。现场测试证实了这一点。
To develop a practical, economical and precision heterodyne interferometer instrument for measuring surface roughness online, phasemeter with high dynamic accuracy is the key technique.Based on phase and integer periodic phase measurement, the implementation of a phasemeter with high dynamic accuracy is described. The accuracy of the phasemeter is 2. 6°(3.2nm) and the maximum Doppler frequency-shift allowed is±20kHz(±8. 75×10-3m/s). It meets the demand of the measurement in process or on machine and was verified by practice, which is very important in fine machining or extra fine machining.
出处
《激光与红外》
CAS
CSCD
北大核心
1997年第2期92-94,共3页
Laser & Infrared
基金
香港蒋氏工业慈善基金
