摘要
提出了用声光调制器实现的外差干涉仪，采用了相位变化整数周期和小数周期测量的外差干涉信号处理方法，不仅使干涉仪的测量分辨率提高到λ／２０００，同时提高了测量镜允许运动速度，解决了用于大动态范围位移的态动测量问题。该外差干涉测量系统可以用作精密数控中位置环的测量手段。
A laser heterodyne interferometer with a AOM device is Proposed. It employsa new method of processing heterodyne signal, that is to measure the integer and fractional period of the phase difference changing of the signals, to Promote measuring resolution which reaches to λ/2000 and measuring range, and to increase allowable speed of the target moving at the same time. this method makes the interferometer be able lo measure the displacement with a large range dynamic. The interferometer can be applied to the positioning in a precision/super-precision CNC machine tool.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
1994年第6期53-57,共5页
Journal of Mechanical Engineering
关键词
数控机床
位置测量
外差干涉
相位测量
干涉仪
CNC machine tool Positioning Heterodyne interferometerPhase measurement
