摘要
介绍一种MEMS电容式微加速度计的结构和等效电路,然后介绍了开关电容放大器的工作原理,最后用可消除寄生电容的等效跨阻取代普通开关电容运放中的并联模拟电阻。设计了一种对寄生电容不敏感的电容-电压转换电路,该电路可用于检测电容传感器的微小差分电容。
First, the structure and equivalent circuit of a MEMS capacitance micro-accelerometer are introduced in this paper. Then, the operational principles of switch-capacitance amplifier are described. Finally, the parallel equivalent resistor in normal switch-capacitance amplifier is replaced by the equivalent transresistance in which parasitic capacitance can be eliminated. And a capacitance-to-voltage signal converter circuit insensitive to the parasitic capacitances is designed, which can be used to detect the micro differential capacitance.
出处
《仪表技术》
2008年第10期62-64,共3页
Instrumentation Technology
基金
国家自然基金资助项目(60574093
50534050)
863计划资助项目(2007AA04Z341)
关键词
开关电容技术
微小差分电容检测
MEMS电容式微加速度计
switch-capacitance circuit technology
detecting technique of micro differential capacitance
MEMS capacitance micro-accelerometer
