摘要
较系统地研究了BCl3浓度、气体流速、温度和时间等工艺参数对渗硼效果的影响规律。优选出在BCl3用量比国内外文献介绍的用量低得多的情况下,仍可获得高质量渗硼层的气体渗硼工艺。
The author has dealt with the influence of the bulk concertration of BCl 3, the velocity of gas flow ,the temperature and the time upon gas boronizing and selected the process by which a high quality gas bornizing layer can be obtained with less guantity of BCl 3 than that reported in literature at home and abroad.