摘要
通过对渗层孔洞的电子探针扫描和气体渗硼的热力学分析证实；孔洞主要是由ＦｅＣｌ产物组成，气氛中的残留Ｈ２Ｏ、Ｏ２加剧了产物的形成。严格控制气氛中残留Ｈ２Ｏ、Ｏ２含量，不仅可有效地防止孔洞的形成，而且可大幅度降低ＢＣｌ３用量。讨论了Ｂ、Ｃｌ２的扩散特点及温度对孔洞形成的影响。
Through microscope probe scanning and thermodynamies analysis ,the author proves that in the boronizing atmosphere of BCl 3+H 2,the layer void is mainly composed of the products of iron chloride and the retained H 2O and O 2 in the BCl 3 +H 2 atmosphere accelerates the formation of the voids. The strict control of the retained content of H 2O and O 2 in the atmosphere can not only efficiently prevent the formation of voids ,but also greatly reduce the dosage of BCl 3 .In addition, the author discusses the diffusion characteristic of B and Cl atoms and the effect that the baronizing temperature has on the formation of the layer voids.
