摘要
通过有限元法的应用,建立了微动工作台静、动特性的有限元分析模型,分析了柔性铰链在几个主要影响因素下的位移、应力分布以及固有频率和振型。应用正交试验设计,全面分析结构主要参数对微动工作台的静、动特性的影响。用逐步回归分析方法对数值计算结果进行回归,获得了微动工作台的性能及其结构尺寸的回归方程,并研制样机对其进行了验证。
A model of static and dynamic characteristic of nanopositioner stage is built with finite element method. The displacement, stress distribution, natural frequencies and vibration modes of flexible hinge effected by some main factors are analyzed. The influences of main structure parameters on static and dynamic characteristics of the nanopositioner stage are investigated by comprehensively using orthogonal test design. The regression equations of the performances, structure sizes of nanopositioner stage are obtained by using stepwise regression analysis on numerical results, and a prototype is manufactured for verification.
出处
《航空制造技术》
2008年第10期82-86,共5页
Aeronautical Manufacturing Technology
关键词
微动工作台
有限元分析
逐步回归分析
Nanopositioner stage Finite element analysis Stepwise regression analysis
