摘要
选用高温超导体ＹＢＣＯ薄膜，利用集成微加工工艺，制成高温超导红外探测器。测得器件的等效噪声功率ＮＥＰ达到１０－１２Ｗ／Ｈｚ１／２，探测率Ｄ为１０９ｃｍＨｚ１／２／Ｗ，其中最好的器件性能为Ｄ＝１．８×１０１０ｃｍＨｚ１／２／Ｗ，表明这类探测器已进入实用阶段，成为红外探测技术发展的新方向之一。
The high T c superconducting infrared detectors were fabricated by using thin film of integration technology.It was shown that the performance of the detectors were goods,NEP was 10 -12 W/Hz 1/2 and D * 10 9 cmHz 1/2 /W.In the future,high T c superconduct inginfrared detectors may offer practical applications.It is one of the developing trend of IR detection technology.
出处
《红外技术》
EI
CSCD
北大核心
1997年第6期5-7,共3页
Infrared Technology
