摘要
激光尘埃粒子计数器是测试洁净度必不可少的仪器,在洁净行业中有很重要的地位。本文介绍的自主研制的标准粒子发生器是校准和测试激光尘埃粒子计数器的基准仪器。国内暂时没有同类仪器,国外的仪器昂贵且维护周期长。本文介绍的仪器通过比较国外多种不同类型的发生器,确定适合我国实际需要的技术路线:成本低廉,性能满足要求。在通过大量比对试验后,证明本仪器满足实际使用的需要,并且某些性能甚至超过了国外产品。
Laser particle counter is necessary in cleanliness test and has important position in cleanroom field. The standard particle generator is the reference apparatus for calibration and test of laser particle counter. The local market has no such apparatus, while foreign ones are expensive and long cycle in maintenance. The generator we developed is low in price and satisfactory or even better in performance, by comparison with various foreign ones, with fight technique suitable to actual demands.
出处
《洁净与空调技术》
2008年第3期1-8,共8页
Contamination Control & Air-Conditioning Technology
