摘要
本文介绍了我国第一台喷气式Z箍缩等离子体装置的设计和运行,讨论了起始氩气密度对等离子体箍缩的影响,研究了热等离子体中的软X射线发射。这台装置的建成为我国进行X射线光刻技术的研究提供了一种重要手段。
The design and operation of China's first gas-puff Z-pinch device is introduced; the effect of the initial argon gas density on Z-pinch is discussed; the soft x-ray emission from the hot plasma is studied. The erection of this device provides a very important tool of studying x-ray lithography in China.
