摘要
采用磁控溅射钛靶,以甲烷和氩气为前驱体,在单晶硅片表面制备了类富勒烯碳薄膜,采用高分辨率透射电子显微镜对薄膜的微观形貌进行了表征,采用纳米压痕仪测定了薄膜的硬度及弹性回复,在球-盘微摩擦试验机上考察了薄膜与不同偶件(Si3N4球、Al2O3球、钢球)对摩的摩擦学行为.结果表明,薄膜具有类富勒烯结构特征,薄膜的硬度为20.9 GPa,对应的弹性回复高达85%.薄膜的摩擦性能与摩擦偶件相关:FL-C薄膜与Si3N4球对摩时磨屑在Si3N4球接触面充分覆盖,所形成的转移膜充当固体润滑剂而有效降低了摩擦系数;FL-C薄膜与钢球对摩时,由于钢球硬度远低于FL-C薄膜硬度,导致钢球在较高的接触压力下发生变形而使其表面粗糙度变大,摩擦系数增大,且FL-C薄膜表面发生了较为强烈的摩擦氧化反应,破坏了薄膜的原始结构,新生成的氧化聚合物结构较为疏松,在摩擦剪切作用下易于发生磨损.
The fullerene-like carbon film was deposited on silicon substrate by dc magnetron sputtering of a titanium target, using methane and argon as the precursors. Friction behavior of the film sliding against different counterparts was investigated on a ball-on-disk tester. Results show that the tribological behavior of the film related to the counterparts. The film exhibited the lowest friction coefficient slid against ball, while the highest friction coefficient was obtained when the film slide against GCr15 steel ball. Combing the results of SEM,3-D profiler and XPS analyses, the tribological mechanism of the film sliding against different counterparts was discussed in detail.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
2008年第4期304-310,共7页
Tribology
基金
国家863计划资助项目(2007AA03Z388)
国家自然科学基金资助项目(50572115)
中国科学院百人计划资助项目
关键词
类富勒烯碳膜
摩擦学行为
转移膜
摩擦氧化反应
FL-C film, tribological behavior, transfer film, tribo-chemical oxidation
