摘要
采用空气等离子体基离子注入技术对Ti6Al4V合金进行了表面改性。注入负脉冲电压分别为10kV,30kV,50kV,注入剂量为0.6×1017ions/cm2。用X射线光电子能谱仪对注入层元素分布进行了分析,结果表明:改性层的外层为TiO2,外层与内层基体之间存在Ti2O3、TiO、TiN;采用球盘磨损试验机对注入层的摩擦学性能进行了研究。结果表明:随着注入电压的增加,摩擦因数减小,耐磨性能提高。且以50kV注空气最为显著,摩擦因数较基体降低了3倍多,磨损体积与比磨损率较基体均下降了1个数量级以上。注入层硬度比基材Ti6Al4V也有明显提高。
The surface modified layer on Ti6Al4V alloy by air plasma based ion implantation at plused voltages -10kV,-30kV, -50kV was studied by X-ray photoeletron spectroscopy （XPS）.The implantation is up to 0.6×10^17ions/cm^2 does. The results showed that： The oxide layer is predominantly TiO2, which contains a small TiO、Ti2O3 and TiN between the outmost layer and metallic substrate. Tribological performance of ion implantation layer was investigated by a ball on disk sliding wear machine. The results indicated that the coefficient of friction is decreased and the wear resistance is increased with the increasing of voltage. The sample of air implantation at pulsed voltage -50kV is most remarkable, the friction coefficient is decreased 3 time as that of the original Ti6Al4V alloy, and the wear volume and wear rate is decreased over an order of magnitude. Compared to the substrate, the surface hardness of the treated sample also improved significantly.
出处
《中国表面工程》
EI
CAS
CSCD
北大核心
2010年第2期50-55,共6页
China Surface Engineering
