摘要
讨论了自激式激光器在表面粗糙度测量中的应用。它利用激光点状聚焦法实现表面质量测量。根据反射光通量的变化来确定表面形状，而反射光通量的变化可转化为光电信号的变化。该方法要求被测表面粗糙度的范围Ｒａ＝０．１～４０μｍ。
The application of self-stimulated laser in surface roughness measurement is discussed. It applies the method of focusing the laser spot to realize the measurement of the surface quality. The method determines the surface profile depending on the change of the luminous flux of reflected light. This change can be converted to photoelectrical signal. The method requires the measured surface roughness R a to be within 0.1～40μm.
出处
《计量学报》
CSCD
北大核心
1997年第4期280-283,共4页
Acta Metrologica Sinica
