摘要
讨论了研制成功的用于高精度非球面检测的ＣＧＨ位相自动探测干涉系统。论述了ＣＧＨ干涉系统的光路和干涉场，采用位相自动探测术有效地降低了随机干扰误差。探讨了采用三波前类剪切干涉法进行绝对测量能有效地消除其系统误差。测试结果表明：该系统检测非球面面形精度达λ／２０。若进一步采用绝对测量法进行测量和处理，则其精度约可达λ／５０。
A phase detecting interferometric system with computer generated hologram (CGH) built recently is described. The optical system and CGH interference field of the CGH interference system is discussed. The synchronous phase detecting technique can reduce the random disturbance. The three-wavefront indirect shearing interferometry is used for removing the systematic errors. The experimental results show that the measuring accuracy of interferometric system is λ/20 and will be up to about λ/50 when the absolute measuring and processing method is used.
出处
《计量学报》
CSCD
北大核心
1997年第4期274-279,共6页
Acta Metrologica Sinica
基金
机械工业部机械工业技术发展基金
关键词
计算全息图
干涉场
位相探测技术
CGH
光学系统
Computer generated hologram (CGH)
Interference field
Phase detecting technique
Absolute measure
