摘要
分析了计算全息（ＣＧＨ）位相探测干涉仪系统的原理特点，提出三波面类剪切干涉法，以消除系统误差，提高非球面检测精度，达到绝对测量的目的．
In this paper the principle of computer generated hologram (CGH) phase detecting interferometric system for testing aspherical surfaces is discussed. A three wave front indirect shearing interferometry is used for removing systematic errors of the interferometer so that the absolute quality of the aspheric surface profile deviation can be obtained. The experimental results show that the measuring accuracy of the interferometric system can be up to λ /50 when the absolute measuring and processing method is used.
出处
《天津大学学报》
EI
CAS
CSCD
1996年第5期658-663,共6页
Journal of Tianjin University(Science and Technology)
基金
机械工业部技术发展基金
关键词
计算全息图
类剪切干涉法
非球面面形
绝对检测
computer generated hologram (CGH), aspherical surface, indirect shearing interferometry, real time phase detecting technique
