摘要
介绍了增黏剂(HMDS)的物化性质及其在光刻工艺中的作用,并且通过实验研究将增黏剂应用于锑化铟材料的光刻工艺,改善了锑化铟的表面状态,增强了锑化铟衬底与光刻胶的黏附性,进而在湿法腐蚀等后续工艺中提高了光刻胶的抗腐蚀性。
The characteristic and the application in lithography technology of the adherence promoter（HMDS） was introduced in this paper. Through the experiment, HMDS had been applied in the lithography technology of InSb, it changed the InSb surface and enhanced the adherence between InSb and photoresist. Consequently, the corrosion resistance of photoresist was increased in the next wet etching etc process.
出处
《激光与红外》
CAS
CSCD
北大核心
2008年第8期789-791,共3页
Laser & Infrared
关键词
增黏剂(HMDS)
锑化铟
光刻工艺
光刻胶
黏附性
抗腐蚀性
the adherence promoter （ HMDS ）
InSb
lithography technology
photoresist
adherence
corrosion resistance
