摘要
用蒙特卡罗方法，模拟计算了辉光放电等离子体源离子注入平面靶表面的能量分布和入射角分布。研究了靶室不同气压和不同温度下能量分布和入射角分布的变化。
A Monte Carlo method is described for studying the energy and angle distributions of N + and N + 2 ions which are in the ion sheath of a glow discharge and are accelerated by a pulsed voltage when arriving at the cathode surface of the target. The changes of the ion energy and angle distributions under different gas pressures and temperatures in the target chamber are given.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
1997年第4期12-18,共7页
Nuclear Fusion and Plasma Physics
基金
河北省教委科学研究计划基金
