摘要
用离子束辅助沉积法在1Cr18Ni9Ti不锈钢表面制备了TiC膜,并对其进行了XPS,SEM及SIMS等微观结构分析,测定了氢在有TiC膜的1Cr18Ni9Ti不锈钢中的渗透率。研究结果表明,制备的TiC膜致密性好且均匀,厚度约为15μm;TiC膜中有大量的CH4-负离子存在,在473-773 K范围内,氢的渗透率降低了4-5个数量级。
TiC film was deposited on the surface of 1Cr18Ni9Ti stainless steel by ion-beam assisted deposition technique. The characteristics of films were tested by XPS, SEM and SIMS. The results show that the film is compact, uniform, thermal shock-resistant. Its thickness is about 15 μm, and has good adherence with the substrate below 773 K. There are lots of CH4 in TiC film. The hydrogen permeability in 1Cr18Ni9Ti stainless steel with TiC film is 4+5 orders of magnitude lower than without TiC film.
出处
《核化学与放射化学》
CAS
CSCD
北大核心
2008年第1期47-50,共4页
Journal of Nuclear and Radiochemistry
基金
中国工程物理研究院科学技术发展基金面上资助项目(20060541)
关键词
TiC膜
结构分析
渗透率
TiC film
structure analysis
permeability