摘要
TiO_2-Ta_2O_5薄膜是较新颖的光学薄膜,由均匀混合的两种化合物薄膜材料作为膜料研制而成,本文采用离子辅助蒸发的方法,以不同配比的Ta_2O_5和TiO_2混合物为初始膜料在K_9玻璃上制备了TiO_2-Ta_2O_5混合薄膜,并对其光学性能进行研究。实验结果表明,TiO_2-Ta_2O_5薄膜在可见光范围内有较高的透射率,消光系数在10-3～10-4数量级,折射率在1.80～2.07范围内变化(550nm),是理想的光学镀膜材料。随着Ta_2O_5含量从0增加到20%,光学带隙从3.266eV单调增加到3.417eV,并用Kayanuma提出的模型解释了透射谱中吸收边的漂移现象。
TiO2-Ta2O5 thin films are new-style optical thin films which are made of mixed compounds as starting material. The TiO2-Ta2O5 compound thin films were fabricated by ion beam assisted deposition on K9 glasses with Ta2O5 and TiO2 of different proportioning as starting materials, and the optical properties were investigated. The testing results show that TiO2-Ta2O5 thin films have the higher transmittance and the lower extinction coefficient at visible light wavelength, and the refractive index varies from 1.80 to 2.07（550nm）. TiO2-Ta2O5 thin films are of great significance in optical fields. The optical band gap of TiO2-Ta2O5 films increase from 3.266eV to 3.417eV while the content of Ta2O5 enhances from 0 to 20%, and the shift of absorption edges in transmittance spectrum is explained by Kayanuma model.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2008年第3期84-87,共4页
Opto-Electronic Engineering
