摘要
由于MEMS器件的可靠性成为MEMS产品商业化过程中一个重要问题,而冲击断裂是导致器件失效的一个重要原因。本文主要研究多晶硅微悬臂梁在冲击条件下的可靠性,文中阐述了断裂失效机理,并使用应力-强度模型对可靠度进行建模。通过实验统计在各种加速度冲击下的可靠度,并将实验实测值与理论值进行对比。
The reliability of MEMS is a key problem for its commercial application. Fracture is a important factor for the failure. In this paper, we mainly focus on fracture Reliability for poly - silicon micro - cantilevers under shock load, expatiate on the failure mechanism of Fracture, and build a model using stress - strength principle. A lot of data will be collected after the shock experiment. Then the comparison between the experimental curve and the theoretic curve would be presented.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2008年第1期103-106,共4页
Journal of Functional Materials and Devices
基金
装备预先研究项目
