摘要
本文简要地介绍用超音速电弧等离子体射流合成金刚石薄膜的原理、装置、性能、特点及目前进展。
An application for a supersonic Arcjet Thruster, designed originally for satellite propulsion is present, providing a new and powerful approach of diamond thin film synthesis. Its principle of synthesis, experimental facility, feature and recent advances are described.
出处
《真空》
CAS
北大核心
1997年第4期30-33,共4页
Vacuum
