摘要
使用X射线衍射仪分析样品,测试角度误差的大小影响着分析结果的准确性,而样品装调误差会导致测试角度误差。本文系统分析了样品装调对测试角度误差的影响。结论是,转动误差和偏心误差对测量误差影响较大,一般需要校正;俯仰误差对测量结果影响较小,一般不用校正。实验表明,通过校正样品装调后的转动误差和偏心误差,可以将测量角度随机性误差控制在0.006°(2θ)以内,并将周期厚度为17nm左右的[Mo/Si]多层膜的测试周期厚度精确到0.1nm,为极紫外区高精度膜厚控制提供了保证。
In the analysis of samples with X-ray diffractometer, angular errors influence the accuracy of analytical results, while the sample fixing and adjustment errors will lead to angular errors. This paper analyzes the influence of sample fixing and adiustment on angular errors. The conclusion is that the rotation and offset errors have great influence on angular errors and need to be corrected, but the influence of pitching errors is much smaller and generally does not need correction. Experiments show that through the correction of rotation and offset errors, the random angular errors can be controlled within 0. 006°（2θ）, and the measurement precision of period thickness for a piece of [Mo/Si] multilayer membrane with a period thickness of about 17nm can reach 0. 1nm, providing a guarantee for high precision membrane thickness control in EUV region.
出处
《分析仪器》
CAS
2008年第1期14-18,共5页
Analytical Instrumentation
