摘要
针对铝乳胶源涂布与气相Ｇａ杂质相结合的受主双质掺杂技术，分析了产生表面层缺陷的原因。
The acceptor double_impurity doping technique is introduced of combining the coating of aluminium emulsion with the gaseous phase Ga impurity to analyse the reasons for producing the surface layer defect,and the remedy measures for reducing the defect are given.
出处
《山东师范大学学报（自然科学版）》
CAS
1997年第2期149-152,共4页
Journal of Shandong Normal University(Natural Science)
基金
山东省科委资助
关键词
受主双质掺杂
表面层缺陷
位错
晶闸管
镓铝扩散
acceptor double_impurity doping technique
surface layer defect
dislocation
measure
