摘要
Zeeman双折射双频激光器能够输出3～40MHz频差的双频激光，可用作高测速双频激光干涉仪的光源。针对这种激光器的特点，以频差约7MHz的Zeeman双折射双频激光器为干涉仪的光源，建立了中频差双频激光干涉仪测量系统。经过与商用HP5528A双频激光干涉仪的比对测量实验得出，中频差双频激光干涉仪实验测量系统测量线性度小于0．002％，测量的标准不确定度小于0．1μm，证明了中频差双频激光干涉系统的可行性和针对这种光源采用的设计方案的正确性。
The Zeeman-birefringence dual frequency laser has adjustable frequency differences from 3 MHz to 40 MHz that can be used as the light source for an interferometer to measure high speed motion. A dual frequency laser interferometer with moderate frequency differences was made using the Zeeman laser with frequency differences of about 7 MHz as the light source to improve measurements at higher speeds. Experiments comparing this system with the HP 5528A dual frequency laser interferometer show that the system linearity is less than 0.002%, with a standard uncertainty of less than 0. 1 μm.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2007年第11期1969-1971,共3页
Journal of Tsinghua University(Science and Technology)
基金
国家自然科学基金资助项目(50575116
50410479)
关键词
双频激光干涉仪
Zeeman-双折射双频激光器
高测速
中频差
外差干涉
dual-frequency laser interferometer
Zeemanbirefringence dual-frequency laser
high speed moderate frequency difference
heterodyne interference
