摘要
文章介绍了非制冷测辐射热计和铁电陶瓷焦平面列阵的现状，包含8万个非制冷氧化钒红外探测器的焦平面列阵已制成热像仪，系统的噪声等效温差（NETD）为0．04℃，不需要制冷和机械调制入射辐射。多晶硅热敏电阻和硅p－n结温差电堆焦平面列阵的研究工作取得了进展，用溅射和化学汽相淀积技术已制成128×128元硅薄膜测辐射热计焦平面列阵，单元探测器的探测率为1×109cmHzW－1；128×128元温差电堆焦平面列阵的NETD为0．5℃。利用热释电效应和介电常数温度变化的铁电陶瓷焦平面列阵制成的热像仪，NETD已达到0．047℃。
The status of Uneded halomter and ferroelectric ceramic FPA used in thermal imagers is introduced in this paper. It is reported that brassboard imagers containing FPA of mere than 80000 uncooled detectors sensitiving to radiatdri in the 8~ 14 μm wavelength region have ben fabricated. These imagers, Which hav demonstrated NETD of 0. 04℃, need nei-ther cryogenic eding nor mechanical scanning. A theroile iofrared imaging sensor with 128 ×128 element has ben developed. A new thermal imaging technology based upon FPA using the pyroelectric effect and dielectric bolometer in ceramic barium strontium titanat (BST) with METD of less than 0. 047℃ is also discussed.
出处
《红外与激光工程》
EI
CSCD
1997年第4期6-11,共6页
Infrared and Laser Engineering
