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乙二胺快速镀铜体系的研究

Study on Quick Copper Electroplating System with Ethylenediamine
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摘要 对乙二胺镀铜工艺进行了研究,讨论了Cu^(2+)浓度、pH值、温度、电流密度等因素对电镀铜效果的影响。主要依据镀层外观和一定时间内镀层厚度,确定了本实验的最佳工艺条件:硫酸铜(CuSO_4·5H_2O)100g/L,乙二胺(C_2N_2H_8)50~68g/L,硝酸钾(KNO_3)3~4g/L,电解液pH值8~9,温度50~60℃,阴极电流密度3~4.5 A/dm^2。 The process of copper electroplating with ethylenediamine was studied. The influences of Cu^2+ concentration, pH, temperature, and current density on the effect of copper electroplating were discussed. The optimum conditions were determined according to the appearance and thickness of the electroplating layer, which were as follows: CuSO4- 5 H2O 100 g/L, C2 N2Ha 50 - 68 g/L, KNO3 3 - 4 g/L, pH 8 - 9, temperature 50 - 60℃, cathodal current density 3 - 4.5 A/dm2.
出处 《精细石油化工进展》 CAS 2007年第10期31-33,共3页 Advances in Fine Petrochemicals
关键词 镀铜 乙二胺 镀铜电解液 copper electroplating, ethylenediamine, electrolyte
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