摘要
针对硬度测试中出现的压痕尺寸效应现象,采用纳米压痕技术与原子力显微技术相结合,得到压痕过程中的载荷与压深加载卸载曲线和压痕三维图,从中可以得到压痕过程中压头所做的塑性功、最大压深、塑性变形面积、塑性变形体积等,并以此为变量提出了一个基于能量平衡方法的改进模型,此模型能更好地解释压痕尺寸效应。单晶硅实验结果表明:在较大压深下,由于形成新表面所消耗的功是出现压痕尺寸效应的主要因素:随着压痕深度的减小,用于克服材料对压头的阻力而消耗的功所起的作用越来越大;而在更小的压深下,用于产生塑性变形的初始能量和测试系统误差所造成的影响会越来越大,不可忽视。
To investigate the hardness indentation size effect （ISE） phenomenon, combining the nano-indentation technique and atomic force microscopy, load-depth curves and indentation images were obtained, and the plastic work in indentation process, max indentation depth, plastic deformation area and plastic deformation volume were calculated from these curves and images. Using these calculated data as variables, an improved hardness indentation size effect model is proposed based on the energy balance method, and the model can more sufficiently describe the hardness indentation size effect. The results for single crystal silicon indentation hardness test indicate that the consumption of energy to create a new surface is the main reason for the ISE phenomenon. With the increase in indentation depth, the consumption of energy to overcome the resistance force between the indenter and the specimen is the main reason for the decrease in indentation depth, and at smaller depths, the experimental equipment errors or the energy threshold at which an indenter creates a permanent indentation effect is more and more important and cannot be ignored.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2007年第11期1478-1483,共6页
Journal of The Chinese Ceramic Society
基金
哈尔滨工业大学基金(HIT.2003.23)
中国博士后科学基金(20060400815)
黑龙江省博士后基金(LBH-Z06130)资助项目。
关键词
压痕尺寸效应
能量平衡方法
硬度
原子力显微镜
单晶硅
indentation size effect
energy balance method
hardness
atomic force microscopy
single crystal silicon
