摘要
在柔性基底金属薄膜的各项参数中,镀层的厚度是最重要的参量。但由于直接测量膜厚非常困难而且成本极高,所以常用的方法是通过测量方阻来间接反映膜厚。介绍了在线方阻测量的原理,并对其国内外发展现状予以综述,提出了一套在线方阻测量的方法,确定了在线方阻测量的结构,最后给出了确定金属薄膜在线方阻值的方法。
It is very important to measure the thickness of plated film in all parameters of the metallic film that deposit on the flexible material. By indirect way measuring the thickness of plated film is a general and good method, because the cost of measuring by direct way is very expensive the cost, This paper only explains the theory that how to measure the thickness through the cube-resistance and summarizes the development trend about it, This paper also gives a serial of methods for measuring the thickness with the cube-resistance, and a conclusion taking the best method and determine the structure to measure the thickness with the cube-resistance.
出处
《机械制造与自动化》
2007年第5期86-88,共3页
Machine Building & Automation
关键词
柔性基底
卷绕真空镀膜
在线方阻
膜厚测量
flexible material
roll and vacuum plated film
cube-resistance
measure thickness of film
