摘要
针对溅射离子泵高压电源应具有的负阻特性,本文详细介绍了负阻性DC/DC开关电源控制电路的组成和工作原理。在此基础上,成功研制了一台输出电压根据真空系统气体压力连续自动调节,可短路工作的高压DC/DC开关电源。该电源具有外特性响应好、结构简单和可靠性高等特点。
In view of the negative resistance characteristics of the high-voltage power supply for SIP （sputter ion pump ）, a special switched DC/DC power supply was introduced. Describes in detail its control circuit and operating principle, Then, a high-voltage power supply was successfully developed, which is available to readjust voltage output automatically and continuously under the gas pressure of vacuum system and work during short circuit. This power supply has the advantages of excellent response to external characteristics, simple construction and high reliability.
出处
《真空》
CAS
北大核心
2007年第5期72-75,共4页
Vacuum
关键词
开关电源
溅射离子泵
负阻特性
switched power supply
SIP（sputter ion pump）
negative resistance characteristic
