摘要
设计了一种新型的分光光度计来测量光学薄膜在任意角度下的温度漂移特性,包括其光学结构、机械结构和数据采集部分.通过偏振器自转实现了自动偏振特性校准功能,采用积分球旋转技术实现了任意角度反射率的测量,同时可以用于薄膜温度漂移特性的测试.分析了光源、环境光、样品厚度等引起的误差以及相应的解决方法.结果表明,此分光光度计可以用于高精度的薄膜特性测量.
A spectrophotometer for measuring the polarized transmittance and reflectance of optical coating at different incident angle and temperature was developed, including the optical system, mechanical structure and data sampling method. The spectrophotometer actualizes polarization-auto-calibration by using polarimeter rotation method and multi-angle reflectance measurement by using integral sphere rotation method, and can be used to measure temperature-induced spectrum shift. The sources of errors such as light source, environment light and sample thickness and their resolutions were discussed. The results indicate that this type of spectrophotometer can be applied into practice.
出处
《浙江大学学报（工学版）》
EI
CAS
CSCD
北大核心
2007年第9期1523-1526,共4页
Journal of Zhejiang University：Engineering Science
关键词
分光光度计
透反射率测量
偏振
温度漂移
spectrophotometer
transmittance and reflectance measurement
polarization
temperatureinduced spectrum shift
