摘要
采用PECVD方法，分别注积了SnO2-Fe2O3、SnO2-TiO2-Fe2O3等双层和三层气敏薄膜材料，制成了旁热式传感器。实验结果表明，这种多层结构的元件对乙醇有很高的灵敏度与选择性。
Double-layer SnO2-Fe2o3 and triple - layer SnO2 - TiO2 - Fe2O3 thin film materials have been prepared by means of PECVD method and side-heating sensors fabricated. The experimental results show that the sensor has high sensitivity and selectivity to alcohol gas.
出处
《传感器技术》
CSCD
1997年第2期45-47,53,共4页
Journal of Transducer Technology
关键词
气体传感器
多层薄膜
酒敏特性
乙醇
Gas transducer Multilayer thin films Alcohol characteristics
