摘要
等离子体法制备超微材料是比较理想的方法之一，采用等离子体法制备类金刚石膜，近年来有了很大的进展，通过比较可知：等离子体法可以在低温下进行化学合成反应，实现了低温化学气相反应过程；反应转率高能充分利用反应物源；不需要其它助剂可以合成高纯度高密度、薄膜粒度可控制在纳米级到亚微米级的材料；可以进行亚稳态物质和新材料的合成。
As a kind of ultramaterial, diamond like film withthe characteristic of diamond has been applied extensively. The preparation of diamond like film by plasma is one of the ideal ways to do it,and it has been progressing rapidly recently. We can make a conclusion by comparision that it can proceed a chemical synthetic reaction by plasma,thereby, achieve the low temperature chemical vapor deposition. The advantage of plasma is that it can achieve with high reaction rate,apply the reaction source to the full, composit with high purity and density without any assistant agent,the film granularity can be controlled to nanometre or submicron and synthesize metastable state matter with new material.
出处
《材料科学与工艺》
EI
CAS
CSCD
1997年第1期36-40,共5页
Materials Science and Technology
