摘要
采用射频-直流等离子体增强化学气相沉积技术在单晶硅衬底上沉积了类金刚石薄膜。用激光拉曼光谱仪和原子力显微镜对薄膜的结构和表面形貌进行了表征,并用纳米压痕仪测定了薄膜的硬度。用UM T微摩擦磨损试验机考察了薄膜在不同的滑行速度下薄膜的摩擦学性能。结果表明:所沉积的薄膜具有典型类金刚石薄膜的结构特征,薄膜表面光滑致密,硬度较高;薄膜与氧化铝陶瓷球对磨显示出良好的摩擦学性能,随着滑行速度的增加,薄膜的摩擦系数单调降低,但磨损寿命先增加后降低。
Diamond-like carbon（DLC） films were prepared on the single crystal silicon substrate by way of DC-RFPECVD. The mierostructure and morphology of the films were investigated by Raman spectroscopy, infrared spectroscopy and atomic force microscopy. The hardness of the film was determined with a nano-indenter. The tribological behavior of the DLC films sliding against an A1203 ball was investigated at different sliding velocities on UMT. The results indicated that the film deposited by DC-RFPECVD has typical diamond-like characteristics, smooth surface and high hardness. Moreover, the film showed good friction-reducing and anti-wear behavior against A1203 ball. With the increasing sliding velocity, the friction coefficient decreases monotonically, but the anti-wear llfe initially increases and then decreases.
出处
《真空》
CAS
北大核心
2006年第1期47-50,共4页
Vacuum
基金
国家"863"计划资助项目(2002AA302607)
关键词
PECVD
类金刚石薄膜
结构
摩擦学性能
PECVD
diamond-like carbon （DLC） films
microstructure
tribological properities
