摘要
本文首先根据计量法规,介绍有关“纳米测量”的基本概念,其中主要有:“纳米”、“测量”、“纳米长度”、“纳米标准器具”、“纳米测量仪器”、“纳米测量方法”等。然后介绍纳米级长度测量的概况。重点介绍纳米级长度扫描电镜测量技术的发展历程和现状。最后展望扫描电镜测量的发展趋势。
Based on the metrology legal norm, the basic concept of nanometer measurement is introduced firstly in this paper. It includes nanometer, measurement, nanometer standard, nanometer measurement instrument, nanometer measurement method, nanometer length, etc. Then, the present status of the measurement of nanometer length is described. More attention is paid to the development and the prospect of the microscope technology for measuring nanometer length.
出处
《上海计量测试》
2007年第2期2-9,共8页
Shanghai Measurement and Testing
关键词
扫描电镜
纳米级
展望
测量
长度
纳米科技
新兴学科
发展前景
nanometer
measurement
standard
measurement instrument
measurement
measurement method
Scanning Electron Microscope（SEM）
