摘要
在详细论述了精密长光栅与激光测振仪OFV-5000的测量原理和方法之后,将二者结合设计了一种X-Y工作台定位误差的动态测量与补偿方法,并且通过实验验证了该方法的有效性。
On the basis of discussing the principle and measurement method of precise length grating and laser vibrometer controller OFV -5000, a method of the dynamic measurement and compensation of position errors of X - Y table is designed by combining the above mentioned two instruments, and the experiment verifies the effectiveness of the method.
出处
《制造技术与机床》
CSCD
北大核心
2007年第4期29-31,共3页
Manufacturing Technology & Machine Tool
